Search results for "Diamond-like carbon"
showing 5 items of 5 documents
Amorphous hydrogenated carbon (a-C:H) depositions on polyoxymethylene: Substrate influence on the characteristics of the developing coatings
2016
Abstract After oxygen plasma treatment polyoxymethylene (POM) material was exposed to acetylene plasma to progressively deposit two different types of amorphous hydrogenated carbon (a-C:H) films. Radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) was used to generate both plasma processes. The surface morphology of the coated samples has been investigated by atomic force microscopy (AFM) and their chemical composition by Diffusive Reflectance Infrared Fourier Transform (DRIFT) and Raman spectroscopy. Results revealed the absence of a solid interlayer formation between the a-C:H films and POM. The in sequence exposure of oxygen and acetylene plasma on POM substrate prevents…
The influence of Cr and Ni doping on the microstructure of oxygen containing diamond-like carbon films
2021
Abstract Non-hydrogenated diamond-like carbon (DLC) films doped with metals and oxygen were deposited by direct current magnetron sputtering. The influence of chromium and nickel on the surface morphology, elemental composition, bonding structure, adhesion force, optical transmittance and nanohardness of the films was characterized by atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDX), multi-wavelength Raman spectroscopy, UV–VIS–NIR spectrophotometry and nanoindenter. The surface roughness was reduced with the addition of Cr (7.4 at. %) or Ni (8.9 at. %) into DLC films. The EDX measurements indicated that the addition of Cr increased the oxygen content by ~37%, while …
Morphological and Chemical Evolution of Gradually Deposited Diamond-Like Carbon Films on Polyethylene Terephthalate: From Subplantation Processes to …
2016
Diamond-like carbon (DLC) films on polyethylene terephthalate (PET) are nowadays intensively studied composites due to their excellent gas barrier properties and biocompatibility. Despite their applicative features being highly explored, the interface properties and structural film evolution of DLC coatings on PET during deposition processes are still sparsely investigated. In this study two different types of DLC films were gradually deposited on PET by radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) using acetylene plasma. The surface morphology of the deposited samples has been analyzed by atomic force microscopy (AFM). Their chemical composition was investigated by …
Evolution of the sp2 content and revealed multilayer growth of amorphous hydrogenated carbon (a-C:H) films on selected thermoplastic materials
2017
Amorphous hydrogenated carbon (a-C:H) films were gradually deposited on high-density polyethylene (HDPE), polyethylene terephthalate (PET) and polyoxymethylene (POM) via an indirect (f-type) and a direct (r-type) plasma-enhanced chemical vapor deposition (PECVD) process with acetylene plasma. The surface morphologies of the thicker r-depositions on the three different thermoplastics have been analyzed by atomic force microscopy (AFM) at varying micrometer scales. Absorbance spectroscopy has been used to characterize the optical properties of all coatings. Intrinsic stress release phenomena are revealed on thicker layers through the detection of characteristic surface corrugations. Based on …
Tribological properties of thin films made by atomic layer deposition sliding against silicon
2018
Interfacial phenomena, such as adhesion, friction, and wear, can dominate the performance and reliability of microelectromechanical (MEMS) devices. Here, thin films made by atomic layer deposition (ALD) were tested for their tribological properties. Tribological tests were carried out with silicon counterpart sliding against ALD thin films in order to simulate the contacts occurring in the MEMS devices. The counterpart was sliding in a linear reciprocating motion against the ALD films with the total sliding distances of 5 and 20 m. Al2O3 and TiO2 coatings with different deposition temperatures were investigated in addition to Al2O3-TiO2-nanolaminate, TiN, NbN, TiAlCN, a-C:H [diamondlike car…